Paper
5 March 2022 Development of optical phased arrays in a micron-scale silicon photonics platform
Sidra Tul Muntaha, Ari Hokkanen, Mikko Harjanne, Matteo Cherchi, Pekka Suopajӓrvi, Petri Karvinen, Markku Pekkarinen, Matthieu Roussey, Timo Aalto
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Abstract
We have designed and fabricated micro-LiDAR chips based on 1D optical phased arrays (OPAs) that collimate light in the horizontal direction only. Thus, a cylindrical lens is needed for the vertical collimation. A part of the work demonstrates the analysis of 1D beam steering experiments through the direct outcoupling from the waveguide facets with two straight cylindrical lenses available commercially and a detailed analysis based on the parameters like Rayleigh range and beam divergence is presented. This work also demonstrates the characterizations of 3D printed curved cylindrical collimating lenses. A thorough analysis based on the experimental work resulted in certain suggestions to improve the collimation and to perform the beam steering in a better way.
© (2022) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Sidra Tul Muntaha, Ari Hokkanen, Mikko Harjanne, Matteo Cherchi, Pekka Suopajӓrvi, Petri Karvinen, Markku Pekkarinen, Matthieu Roussey, and Timo Aalto "Development of optical phased arrays in a micron-scale silicon photonics platform", Proc. SPIE 12004, Integrated Optics: Devices, Materials, and Technologies XXVI, 120040W (5 March 2022); https://doi.org/10.1117/12.2609605
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KEYWORDS
Phased array optics

Beam steering

Collimation

LIDAR

Waveguides

Optical testing

Silicon photonics

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