Role of ion accumulation in lofting of submicrometer-sized dielectric particle from dielectric surface by plasma and low-energy electron beam

Pavel Krainov; Vladimir Ivanov; Dmitry Astakhov; Slava Medvedev; Mark van de Kerkhof

doi:10.1117/12.2614003

26 May 2022 Role of ion accumulation in lofting of submicrometer-sized dielectric particle from dielectric surface by plasma and low-energy electron beam

Pavel Krainov, Vladimir Ivanov, Dmitry Astakhov, Slava Medvedev, Mark van de Kerkhof

Author Affiliations +

Proceedings Volume 12051, Optical and EUV Nanolithography XXXV; 1205103 (2022) https://doi.org/10.1117/12.2614003
Event: SPIE Advanced Lithography + Patterning, 2022, San Jose, California, United States

Abstract

A particle-in-cell model is used to investigate the dust levitation phenomenon. A submicrometer-sized silicon dioxide particle lying on a silicon dioxide substrate is exposed to a low-energy electron beam and the flux of ions and electrons from a cold plasma. The combined effect of ion and electron accumulation between the particle and the substrate is reported. The results are of interest for dust mitigation in the semiconductor industry, the lunar exploration, and the explanation of the dust levitation.

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Citation Download Citation

Pavel Krainov, Vladimir Ivanov, Dmitry Astakhov, Slava Medvedev, and Mark van de Kerkhof "Role of ion accumulation in lofting of submicrometer-sized dielectric particle from dielectric surface by plasma and low-energy electron beam", Proc. SPIE 12051, Optical and EUV Nanolithography XXXV, 1205103 (26 May 2022); https://doi.org/10.1117/12.2614003

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