Fractal characterization of nano anisotropic rough surface

Hui Wang; Jiwen Cui; Yarui Ma; Jianwei Wu; Jiubin Tan

doi:10.1117/12.2612033

19 November 2021 Fractal characterization of nano anisotropic rough surface

Hui Wang, Jiwen Cui, Yarui Ma, Jianwei Wu, Jiubin Tan

Proceedings Volume 12059, Tenth International Symposium on Precision Mechanical Measurements; 1205913 (2021) https://doi.org/10.1117/12.2612033
Event: Tenth International Symposium on Precision Mechanical Measurements, 2021, Qingdao, China

Abstract

With the development of ultra-precision equipment, the roughness of contact surface can reach the nanometer level, and the surface morphology has a significant impact on surface contact, friction, wear and lubrication. At present, the surface morphology description is mainly based on the measurement, which is scale dependent, and the statistical parameters obtained by different sampling length and measurement resolution are different, so it is impossible to realize the accurate characterization of nanoscale rough surface. Because the rough surface is self-affine, another method can be introduced to characterize the rough morphology, fractal theory. The simulated rough surface has the advantage that it is not limited by the sampling length, and can realize the unique characterization of the rough surface. In this study, a nanoscale anisotropic three-dimensional fractal surface is established based on W-M model, and the relationships between fractal dimension D, roughness coefficient G, contour arithmetic mean deviation Sa and contour height standard deviation Sq are studied based on statistical principle. Finally, it is determined that the key parameter for the characterization of nanoscale rough morphology is the roughness coefficient G

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Hui Wang, Jiwen Cui, Yarui Ma, Jianwei Wu, and Jiubin Tan "Fractal characterization of nano anisotropic rough surface", Proc. SPIE 12059, Tenth International Symposium on Precision Mechanical Measurements, 1205913 (19 November 2021); https://doi.org/10.1117/12.2612033

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KEYWORDS

Fractal analysis

Surface finishing

Statistical analysis

3D image processing

3D modeling

Statistical modeling

Spatial frequencies

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