Paper
1 May 1990 Deformation analysis of optical components for CO2 laser systems using holographic interferometry
Manfred Weck, M. Krauhausen
Author Affiliations +
Proceedings Volume 1212, Practical Holography IV; (1990) https://doi.org/10.1117/12.17985
Event: OE/LASE '90, 1990, Los Angeles, CA, United States
Abstract
The application of high energy lasers for material processing requires a high beam quality. This is e. g. determined by the image quality of the optical elements used for beara guidance and shaping. Up to now in the construction of the elements several influencing parameters that occur during laser processing were largely neglected. Reasons for this are the lindted knowledge about the operational performance of optical elements for high power lasers (up to 25 kW) and the difficult measurement of the accuring deformations and displacements . Responsible for the deterioration of the desired image properties of the optical elements are on the one hand manufacturing inaccuracies and on the other hand statical, dynamical, and thermal process forces. Statical forces result from the mounting of the optical components and the applied coolant pressure. Dynamical forces can occur due to vibrations of the mechanical components of the beam guidance and fluctuations of the coolant pressure. The absorption of a small part of the incident laser radiation leads to a heat-up of the optical element, resulting in a time and space-dependent deformation of the optics. The statical, dynamical and thermal deformations and displacements occur simultaneously. A systematic analysis of the operational behavior requires a separated consideration of these parameters. Only this proceeding can lead to a weighting of the influencing parameters. Using holographic interferometry such a separated consideration of the different influences becomes possible. It also allows not only the investigation of the optical component (e. g. mirror) but also the other components of the optical element. The results of this investigation lead to first conclusions about the operational behavior of the considered optical elements. Mainly responsible for the occuring deviations is the applied coolant pressure. The deviations due to absorbed beam power have a smaller significance.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Manfred Weck and M. Krauhausen "Deformation analysis of optical components for CO2 laser systems using holographic interferometry", Proc. SPIE 1212, Practical Holography IV, (1 May 1990); https://doi.org/10.1117/12.17985
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KEYWORDS
Optical components

Mirrors

Holography

Image processing

Carbon dioxide lasers

Holographic interferometry

Laser processing

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