Lateral shearing interferometry with continuously variable shear ratio

Zhiqian Cai; Junyong Zhang; Pengqian Yang

doi:10.1117/12.2617726

15 February 2022 Lateral shearing interferometry with continuously variable shear ratio

Zhiqian Cai, Junyong Zhang, Pengqian Yang

Proceedings Volume 12166, Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021); 1216666 (2022) https://doi.org/10.1117/12.2617726
Event: Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021), 2021, Hong Kong, Hong Kong

Abstract

Lateral shearing interferometry with different shear ratio has different measurement sensitivity, which corresponds to different measurement accuracy. To image the wavefront of an unknown system, high precision measurement accuracy is particularly important. Here a quadriwave lateral shearing interferometry (QWLSI) with continuous adjustable shear ratio is proposed, in which the light splitting grating is placed in the front of the first condenser lens rather than in late position for the traditional QWLSI. In this case, the shear ratio is proportional to the ratio of the defocusing amount to the focal length of the imaging lens. The newly developed QWLSI with continuously variable shear ratio, not only can measure the system aberration, but also calibrate the spatial resolution of the measured wavefront. Software GLAD simulation and experimental results on phase imaging show that the proposed scheme can not only realize variable-shear-ratio interferogram but also has a good robustness, which is well suitable for quantitative phase imaging.

Citation Download Citation

Zhiqian Cai, Junyong Zhang, and Pengqian Yang "Lateral shearing interferometry with continuously variable shear ratio", Proc. SPIE 12166, Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021), 1216666 (15 February 2022); https://doi.org/10.1117/12.2617726

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KEYWORDS

Wavefronts

Interferometry

Optical filters

Phase imaging

Diffraction gratings

Signal to noise ratio

Diffraction

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