Selection and analysis of translation amount of conjugate translation difference surface absolute measurement technology

Mengyao Zhang; Ailing Tian; Xueliang Zhu; Hongjun Wang; Bingcai Liu

doi:10.1117/12.2620650

27 March 2022 Selection and analysis of translation amount of conjugate translation difference surface absolute measurement technology

Mengyao Zhang, Ailing Tian, Xueliang Zhu, Hongjun Wang, Bingcai Liu

Author Affiliations +

Proceedings Volume 12169, Eighth Symposium on Novel Photoelectronic Detection Technology and Applications; 121690Q (2022) https://doi.org/10.1117/12.2620650
Event: Eighth Symposium on Novel Photoelectronic Detection Technology and Applications, 2021, Kunming, China

Abstract

In order to improve the surface shape detection accuracy of large-aperture planar optical elements, the paper studies the key parameters in the conjugate translation difference technology, and proposes a method for selecting the optimal solution of the translation amount. This method first analyzes the theoretical accuracy of the conjugate translation difference technique, and concludes that only under the influence of the difference approximation, the surface shape detection error decreases with the decrease of the translation amount; then, for the inevitable noise factors in the detection process, it establishes The relationship model between the translation amount and the signal-to-noise ratio shows that the smaller the translation amount, the lower the signal-to-noise ratio, the lower the detection accuracy; finally, the value of the translation amount is optimized by considering the above two factors through simulation. The simulation results show that the higher the accuracy of the surface to be measured or the greater the noise of the system, the larger the value of the optimal translation value and the wider the interval of the optimal translation. When the surface accuracy of the measured surface is λ/40, the system When the noise η is 4nm, the surface shape reconstruction error in the best translation interval is better than 0.6nm

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Mengyao Zhang, Ailing Tian, Xueliang Zhu, Hongjun Wang, and Bingcai Liu "Selection and analysis of translation amount of conjugate translation difference surface absolute measurement technology", Proc. SPIE 12169, Eighth Symposium on Novel Photoelectronic Detection Technology and Applications, 121690Q (27 March 2022); https://doi.org/10.1117/12.2620650

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KEYWORDS

Signal to noise ratio

Error analysis

Shape analysis

Interference (communication)

Photovoltaics

Mirrors

Analytical research

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