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7 November 2022 Human machine competition in intelligent laser manufacturing in semiconductor processes
Chung-Yuan Chang, Cheng Ching Hsu, Tejender Rawat, Shih-Wei Chen, Albert Lin
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Proceedings Volume 12221, Optical Manufacturing and Testing XIV; 1222104 (2022) https://doi.org/10.1117/12.2632661
Event: SPIE Optical Engineering + Applications, 2022, San Diego, California, United States
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Chung-Yuan Chang, Cheng Ching Hsu, Tejender Rawat, Shih-Wei Chen, and Albert Lin "Human machine competition in intelligent laser manufacturing in semiconductor processes", Proc. SPIE 12221, Optical Manufacturing and Testing XIV, 1222104 (7 November 2022); https://doi.org/10.1117/12.2632661
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KEYWORDS
Semiconductor manufacturing
Annealing
Semiconductor lasers
Semiconductors
Laser manufacturing
Optimization (mathematics)
Physics
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