Presentation + Paper
3 October 2022 Evaluating SMR positioning with an autostigmatic microscope
Author Affiliations +
Abstract
An optical method of determining the location of the apex of a corner reflector mounted in a steel ball, commonly referred to as a Spherically Mounted Retroreflector (SMR), relative to the center of the ball to the 1-2 μm level was previously described by us. The method used an autostigmatic microscope focused on the apex and viewed the reflected spot image as the SMR was rotated about a normal to its entrance aperture. This measurement determined the lateral offset of the apex and tipping the SMR while viewing the spot gave an indication of the axial displacement. A related questions arose recently, could the distance between two SMRs be determined to the same level of precision if the SMRs were rigidly mounted in a fixture so they could not be moved. We show the answer is yes assuming the stage moving the pair of SMRs has the required precision. As a SMR is scanned under the autostigmatic microscope the spot motion seen by the microscope is identical to that seen when scanning a spherical ball under the microscope and we have already shown that balls centers can be found to 1 μm precision using a 10x objective. We show experimentally that we can determine the distance between 2 SMRs by repeated measurements with the balls in different azimuthal orientations, and show that by taking into account the orientation, the distance between SMRs remains the same within experimental errors.
Conference Presentation
© (2022) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Karlene Karrfalt, Robert E. Parks, and Daewook Kim "Evaluating SMR positioning with an autostigmatic microscope", Proc. SPIE 12221, Optical Manufacturing and Testing XIV, 122210Y (3 October 2022); https://doi.org/10.1117/12.2633238
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KEYWORDS
Retroreflectors

Mirrors

Distance measurement

Calibration

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