In-process OCT monitoring to control holographic laser processing

Satoshi Hasegawa; Yoshio Hayasaki

doi:10.1117/12.2642444

30 December 2022 In-process OCT monitoring to control holographic laser processing

Satoshi Hasegawa, Yoshio Hayasaki

Proceedings Volume 12316, Advanced Optical Imaging Technologies V; 1231606 (2022) https://doi.org/10.1117/12.2642444
Event: SPIE/COS Photonics Asia, 2022, Online Only

Abstract

A holographic technique is useful for increasing the processing speed in laser grooving and scribing. In laser grooving, depth control of the processed structure is important for performing precise processing. In this paper, in-process monitoring of the depth of a structure formed by femtosecond laser processing with a line-shaped beam using sweptsource optical coherence tomography (SS-OCT) was demonstrated. In laser grooving, the structural depth and the shape were successfully monitored. The proposed method will be effective for precise laser processing with feedback control of the laser parameters based on in-process monitoring of the processed structure.

Citation Download Citation

Satoshi Hasegawa and Yoshio Hayasaki "In-process OCT monitoring to control holographic laser processing", Proc. SPIE 12316, Advanced Optical Imaging Technologies V, 1231606 (30 December 2022); https://doi.org/10.1117/12.2642444

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