Status of curvilinear data format working group

Jin Choi; Soo Ryu; Sukho Lee; Minah Kim; Sanghee Lee; Peter Buck; Bhardwaj Durvasula; Sayalee Gharat; Vlad Liubich

doi:10.1117/12.2641557

15 September 2022 Status of curvilinear data format working group

Jin Choi, Soo Ryu, Sukho Lee, Minah Kim, Sanghee Lee, Peter Buck, Bhardwaj Durvasula, Sayalee Gharat, Vlad Liubich

Proceedings Volume 12325, Photomask Japan 2022: XXVIII Symposium on Photomask and Next-Generation Lithography Mask Technology; 1232508 (2022) https://doi.org/10.1117/12.2641557
Event: Photomask Japan 2022, 2022, Online Only

Abstract

For the era of multi-beam mask writer, in the 2019 BACUS conference, we proposed the formation of a data format working group to address the need for curvilinear data representation. The new working group was formed in October 2019 driven by major semiconductor companies with representations from Mentor, Synopsys, Nippon Control Systems, D2S, Aselta, and ASML-BRION with the initial goals to quantify the curvilinear data volume problem; develop, test and implement new or revised formats based on OASIS; and to formalize the working group as a SEMI task force (TF). In this paper, the necessity of a new curvilinear data format and the progress of our TF will be introduced. Furthermore, we demonstrate that given the nature of curvilinear data, representing it using native curve formats has significant value to reduce file size for future mask making flows.

Citation Download Citation

Jin Choi, Soo Ryu, Sukho Lee, Minah Kim, Sanghee Lee, Peter Buck, Bhardwaj Durvasula, Sayalee Gharat, and Vlad Liubich "Status of curvilinear data format working group", Proc. SPIE 12325, Photomask Japan 2022: XXVIII Symposium on Photomask and Next-Generation Lithography Mask Technology, 1232508 (15 September 2022); https://doi.org/10.1117/12.2641557

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