Ultrafast laser processing of flexible ultrathin glass

Jonas Kleiner; Keyou Chen; Felix Zimmermann; Christian Weddeling; Timo Flaig; Myriam Kaiser; Julian Hellstern; Christoph Tillkorn; Daniel Flamm

doi:10.1117/12.2650343

17 March 2023 Ultrafast laser processing of flexible ultrathin glass

Jonas Kleiner, Keyou Chen, Felix Zimmermann, Christian Weddeling, Timo Flaig, Myriam Kaiser, Julian Hellstern, Christoph Tillkorn, Daniel Flamm

Author Affiliations +

Proceedings Volume 12409, Laser-based Micro- and Nanoprocessing XVII; 1240905 (2023) https://doi.org/10.1117/12.2650343
Event: SPIE LASE, 2023, San Francisco, California, United States

Abstract

We present an optical concept and adapted ultrashort pulsed laser parameters for a precise cleaving process of flexible ultrathin glasses. To this end, non-diffracting beams with tailored transverse intensity profiles generate asymmetric type-III-regime modifications along the entire substrate thickness. These laser-induced material changes not only show advantages in cutting but can also improve the bending properties of these flexible glasses when arranged in a specific manner. During the relative movement of the workpiece to the processing optics, crack connection occurs between the specifically aligned modifications only, which considerably facilitates glass separation and increases yield.

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Citation Download Citation

Jonas Kleiner, Keyou Chen, Felix Zimmermann, Christian Weddeling, Timo Flaig, Myriam Kaiser, Julian Hellstern, Christoph Tillkorn, and Daniel Flamm "Ultrafast laser processing of flexible ultrathin glass", Proc. SPIE 12409, Laser-based Micro- and Nanoprocessing XVII, 1240905 (17 March 2023); https://doi.org/10.1117/12.2650343

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