Liquid metal fabrication of ultrathin Ga2O3 and GaN layers for integrated optics

Panteha Pedram; Ali Zavabeti; Nitu Syed; Amine Slassi; Chung Kim Nguyen; Benjamin Fornacciari; Anne Lamirand; Jules Galipaud; Arrigo Calzolari; Andreas Boes; Torben Daenke; Sébastien Cueff; Arnan Mitchell; Christelle Monat

doi:10.1117/12.2659145

17 March 2023 Liquid metal fabrication of ultrathin Ga₂O₃ and GaN layers for integrated optics

Panteha Pedram, Ali Zavabeti, Nitu Syed, Amine Slassi, Chung Kim Nguyen, Benjamin Fornacciari, Anne Lamirand, Jules Galipaud, Arrigo Calzolari, Andreas Boes, Torben Daenke, Sébastien Cueff, Arnan Mitchell, Christelle Monat

Author Affiliations +

Proceedings Volume 12423, 2D Photonic Materials and Devices VI; 1242309 (2023) https://doi.org/10.1117/12.2659145
Event: SPIE OPTO, 2023, San Francisco, California, United States

Abstract

We report on the synthesis of 2D GaN materials by the so-called liquid metal chemistry and tuning of their composition between oxide and nitride materials. This technique promises easier integration of 2D materials onto photonic devices compared to traditional “top-down” and “bottom-up” methods. Our fabrication method is carried out via a two-step liquid metal-based printing method followed by a microwave plasma-enhanced nitridation reaction. The synthesis of GaN relies on plasma-treated liquid metal-derived two-dimensional (2D) sheets that were squeeze-transferred onto desired substrates. We characterized the composition and optical properties of the resulting nm-thick GaN films using AFM, XPS, and ellipsometry measurements. Finally, the optical indices measured by ellipsometry are compared with theoretical results obtained by density functional theory (DFT). Our results represent a first step toward integrating 2D materials and semiconductors into electronics and optical devices.

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Citation Download Citation

Panteha Pedram, Ali Zavabeti, Nitu Syed, Amine Slassi, Chung Kim Nguyen, Benjamin Fornacciari, Anne Lamirand, Jules Galipaud, Arrigo Calzolari, Andreas Boes, Torben Daenke, Sébastien Cueff, Arnan Mitchell, and Christelle Monat "Liquid metal fabrication of ultrathin Ga₂O₃ and GaN layers for integrated optics", Proc. SPIE 12423, 2D Photonic Materials and Devices VI, 1242309 (17 March 2023); https://doi.org/10.1117/12.2659145

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