VCSEL as sensing element to measure distance changes in the nm-range

A. Günther; D. Korat; P. Kotra; W. Kowalsky; B. Roth

doi:10.1117/12.2646484

15 March 2023 VCSEL as sensing element to measure distance changes in the nm-range

A. Günther, D. Korat, P. Kotra, W. Kowalsky, B. Roth

Proceedings Volume 12439, Vertical-Cavity Surface-Emitting Lasers XXVII; 124390H (2023) https://doi.org/10.1117/12.2646484
Event: SPIE OPTO, 2023, San Francisco, California, United States

Abstract

We investigated a novel sensor concept based on a coupled resonator configuration and the employment of vertical-cavity surface-emitting laser (VCSEL) sources. Hereby, the back reflection of a sample which is placed next to the emission window of the semiconductor based laser source affects the internal resonator conditions of the VCSEL. If the operating voltage is kept constant, the internal interaction results in a change of the emitted wavelength and operating current, respectively. First experiments show a reproducible change of the operating current when the sample is moved in vertical direction by a few nm. This behavior was previously verified with a simulation based on ANSYS Lumerical by creating distributed Bragg reflection (DBR) stacks with different layers and quantifying the influence of the movable third resonator surface on the emission wavelength.

Conference Presentation

Citation Download Citation

A. Günther, D. Korat, P. Kotra, W. Kowalsky, and B. Roth "VCSEL as sensing element to measure distance changes in the nm-range", Proc. SPIE 12439, Vertical-Cavity Surface-Emitting Lasers XXVII, 124390H (15 March 2023); https://doi.org/10.1117/12.2646484

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