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With the development of the micro/nano machining technology, various devices tend to be miniaturized and lightweight. Micro-optical elements as one of most important devices, for its easy integration and broad functions, has been extensively studied. Microlens have been widely used in the fields of imaging, detection and sensing. In order to enhance the stability and broaden the application environment of the microlens, fabricating the microlens based on hard and brittle materials is necessary. Hard and brittle material different from soft materials, which have high thermal and mechanical stability, and have the ability used in harsh conditions. In this study, we combined femtosecond laser single pulse fabrication with HF wet etching on fused silica to realized concave microlens on fused silica. Moreover, microlens with different focus can be realized by adjusting fabrication parameters. The results indicated that the fabricated microlens have excellent focusing and imaging properties. The femtosecond laser single pulse fabrication assisted with HF wet etching exhibits high flexibility and shows the huge potential of fabrication micro-optical elements on fused silica.
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