Study on removal characteristics of double-sided rapid polishing machine

Hailin Guo; Dasen Wang; Shijie Zhao; Siling Huang; Chaoxiang Xia; Xu Zhang

doi:10.1117/12.2666595

27 January 2023 Study on removal characteristics of double-sided rapid polishing machine

Hailin Guo, Dasen Wang, Shijie Zhao, Siling Huang, Chaoxiang Xia, Xu Zhang

Proceedings Volume 12550, International Conference on Optical and Photonic Engineering (icOPEN 2022); 125501U (2023) https://doi.org/10.1117/12.2666595
Event: International Conference on Optical and Photonic Engineering (icOPEN 2022), 2022, ONLINE, China

Abstract

Double-sided rapid polishing machine is a new type of polishing equipment which utilizes the principle of chemical mechanical polishing and the shape precision copying mechanism to remove materials from the upper and lower surfaces of optical elements. To analyze the principle of double-sided rapid polishing machine, a material removal model based on Preston equation was established, and the relationship between the parameters such as eccentricity, rotational speed ratio and swing stroke and the material removal uniformity was obtained, which provided a theoretical basis for the double-sided rapid polishing process. With 430mm×430mm×10mm large diameter optical element as the experimental object, the double-sided rapid polishing test was carried out, and the precision index of surface shape accuracy λ/2 was obtained, which realized the high efficiency and high precision machining of plate optical element.

Citation Download Citation

Hailin Guo, Dasen Wang, Shijie Zhao, Siling Huang, Chaoxiang Xia, and Xu Zhang "Study on removal characteristics of double-sided rapid polishing machine", Proc. SPIE 12550, International Conference on Optical and Photonic Engineering (icOPEN 2022), 125501U (27 January 2023); https://doi.org/10.1117/12.2666595

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