Determination of bimetallic film’s thickness and optical constants based on SPR phase detection

Chong Yue; Yueqing Ding; Lei Tao; Sen Zhou; Long Chen

doi:10.1117/12.2651767

23 January 2023 Determination of bimetallic film’s thickness and optical constants based on SPR phase detection

Chong Yue, Yueqing Ding, Lei Tao, Sen Zhou, Long Chen

Proceedings Volume 12556, AOPC 2022: Optoelectronics and Nanophotonics; 125561P (2023) https://doi.org/10.1117/12.2651767
Event: Applied Optics and Photonics China 2022 (AOPC2022), 2022, Beijing, China

Abstract

A method for solving bimetallic film coefficients using surface plasmon resonance (SPR) phase difference experimental data with fixed wavelength and multiple incident angles is presented to simplify and quickly solve the thickness and optical constants of metal films in this paper. The purpose is to extract unknown parameters from the phase difference between P- and S- polarizations of the reflected light occurred at the metal/dielectric interface. The results of bimetallic layer film’s thickness and optical constants obtained by our method are in better agreement with that of spectroscopic ellipsometer (SE) measurement method. Therefore, the approach reveals the possibility of retrieving the thickness and optical constants from the measurement results of the phase difference for multilayers, and makes it be a much better option to be employed for further film’s parameter analysis applications

Citation Download Citation

Chong Yue, Yueqing Ding, Lei Tao, Sen Zhou, and Long Chen "Determination of bimetallic film’s thickness and optical constants based on SPR phase detection", Proc. SPIE 12556, AOPC 2022: Optoelectronics and Nanophotonics, 125561P (23 January 2023); https://doi.org/10.1117/12.2651767

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available