Comparison of scanning stability analysis with the dual-axis MEMS scanner based on switchable driving mode in optical coherence tomography imaging technology

Yi-Chun Wu; Hsin-Fang Chen; Ting-Hao Chen; Ting-Yen Tsai; Chuan-Bor Chueh; Jui-Che Tsai; Hsiang-Chieh Lee

doi:10.1117/12.3008158

20 September 2023 Comparison of scanning stability analysis with the dual-axis MEMS scanner based on switchable driving mode in optical coherence tomography imaging technology

Yi-Chun Wu, Hsin-Fang Chen, Ting-Hao Chen, Ting-Yen Tsai, Chuan-Bor Chueh, Jui-Che Tsai, Hsiang-Chieh Lee

Author Affiliations +

Proceedings Volume 12608, Biomedical Imaging and Sensing Conference; 126081G (2023) https://doi.org/10.1117/12.3008158
Event: Optics and Photonics International Congress, 2023, Yokohama, Japan

Abstract

Micro-electro-mechanical system (MEMS) scanner has the potential to be used in the optical coherence tomography (OCT) imaging system due to fabrication friendliness, and miniature architecture size. The function of feedback control circuits provides the output signal to be fed back to the scanner enabling correcting the drive waveform in real-time to conquer the limitation of scanning stability of the MEMS scanner. In this study, we have developed a swept-source optical coherence tomography (SS-OCT) system configuration of a dual-axis MEMS scanner, switchable operated between open-loop and closed-loop driving modes, to investigate the scanning stability of the MEMS scanner by analyzing the scanning trajectories detected by the position sensitive device (PSD) sensor at frame rates of 50 and 250 Hz. Preliminary results of the quantitative analysis are presented in this paper.

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Yi-Chun Wu, Hsin-Fang Chen, Ting-Hao Chen, Ting-Yen Tsai, Chuan-Bor Chueh, Jui-Che Tsai, and Hsiang-Chieh Lee "Comparison of scanning stability analysis with the dual-axis MEMS scanner based on switchable driving mode in optical coherence tomography imaging technology", Proc. SPIE 12608, Biomedical Imaging and Sensing Conference, 126081G (20 September 2023); https://doi.org/10.1117/12.3008158

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KEYWORDS

Scanners

Microelectromechanical systems

Optical coherence tomography

Data acquisition

Optical switching

Signal detection

Imaging technologies

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