Machining accuracy of convex blazed grating for Offner imaging spectrometer by diamond turning

Huang Li; Xiaoqiang Peng; Chaoliang Guan; Hao Hu; Chao Xu; Tiancong Luo

doi:10.1117/12.2663279

4 April 2023 Machining accuracy of convex blazed grating for Offner imaging spectrometer by diamond turning

Huang Li, Xiaoqiang Peng, Chaoliang Guan, Hao Hu, Chao Xu, Tiancong Luo

Proceedings Volume 12617, Ninth Symposium on Novel Photoelectronic Detection Technology and Applications; 126170Q (2023) https://doi.org/10.1117/12.2663279
Event: 9th Symposium on Novel Photoelectronic Detection Technology and Applications (NDTA 2022), 2022, Hefei, China

Abstract

To solve the problem of machining accuracy of a convex blazed grating for an Offner imaging spectrometer by diamond turning limiting the imaging quality of the optical system, analyze the effect of Poisson burr on the diffraction efficiency of convex blazed grating, investigate the effect of the layout of blazed grating on the convex surface on the machining accuracy, and compare the performance of cutting convex gratings with microcrystalline aluminum RSA6061 and RSA6061 + chemically plated NiP for two workpiece materials. Turning with a 4-axis ultra-precision machining system yielded a convex blazed grating with a substrate radius of curvature R=41.104mm, substrate diameter of 14mm, the grating density of 53.97 line/mm, and blaze angle of about 3.8°. Cutting experiments show that RSA6061+ chemically plated NiP material is better for convex grating processing; the blaze angle error is better with the equal-along-projection layout than with the equal-along-arc layout; Poisson burr height is about 0.3μm; and the average roughness of the final grating blaze surface is less than 5nm to meet the processing quality requirements.

Citation Download Citation

Huang Li, Xiaoqiang Peng, Chaoliang Guan, Hao Hu, Chao Xu, and Tiancong Luo "Machining accuracy of convex blazed grating for Offner imaging spectrometer by diamond turning", Proc. SPIE 12617, Ninth Symposium on Novel Photoelectronic Detection Technology and Applications, 126170Q (4 April 2023); https://doi.org/10.1117/12.2663279

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KEYWORDS

Diffraction gratings

Diffraction

Diamond machining

Spectroscopy

Surface roughness

Diamond

Aluminum

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