MEMS-based laser scanning patterns: programming and experiments

Andrei Maldăr; Virgil-Florin Duma

doi:10.1117/12.2670101

7 August 2023 MEMS-based laser scanning patterns: programming and experiments

Andrei Maldăr, Virgil-Florin Duma

Proceedings Volume 12624, Digital Optical Technologies 2023; 126241I (2023) https://doi.org/10.1117/12.2670101
Event: SPIE Digital Optical Technologies, 2023, Munich, Germany

Conference Poster

Abstract

Laser scanners using Micro-Electro-Mechanical Systems (MEMS) with oscillatory mirrors are one of the most promising types of such devices. The aim of this work is to approach the implementation of various scan patterns using such MEMS scanners. Raster, spiral, and Lissajous scan patterns are programmed and generated, with different characteristic parameters. The starting point of the study is our approach on raster scanning using galvanometer-based scanners (GSs) to design optimal functions of such systems. In this respect, MEMS scanners are a particular case of GSs for which both oscillatory mirrors are placed in the same plane, thus improving the focusing of the device. A comparison is made between such scanning modalities: performances are evaluated based on the several criteria such as speed, resolution, field-of-view (FOV), fill factor (FF) and linearity of the generated scan patterns. Experimental validations are performed to determine the offset that is occurred in the actual implementation. Possible applications where this scanning technique may be preferred are pointed out.

Citation Download Citation

Andrei Maldăr and Virgil-Florin Duma "MEMS-based laser scanning patterns: programming and experiments", Proc. SPIE 12624, Digital Optical Technologies 2023, 126241I (7 August 2023); https://doi.org/10.1117/12.2670101

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available