PRIME process: an alternative to multiple layer resist systems and high accelerating voltage for e-beam lithography

Serge V. Tedesco; Christophe Pierrat; Francoise Vinet; Brigitte Florin; Michel Lerme; Jean Charles Guibert

doi:10.1117/12.20168

1 May 1990 PRIME process: an alternative to multiple layer resist systems and high accelerating voltage for e-beam lithography

Serge V. Tedesco, Christophe Pierrat, Francoise Vinet, Brigitte Florin, Michel Lerme, Jean Charles Guibert

Author Affiliations +

Proceedings Volume 1263, Electron-Beam, X-Ray, and Ion-Beam Technology: Submicrometer Lithographies IX; (1990) https://doi.org/10.1117/12.20168
Event: Microlithography '90, 1990, San Jose, CA, United States

Abstract

A new positive working system for e-beam lithography, called PRIME (Positive Resist IMage by dry Etching) is proposed. High contrast (about 6) and resolution 75 nm L/S in O.351um thick resist are achieved. Very steep profiles can be obtai- ned on thick resist even at low accelerating voltage as O.2pm hole in l.2pm thick resist at 20 keV. To be able to quantify both intra and inter proximity effect on positive tone resist specific two layers electric tests chips were designed. Then PRIME process has been compared, in terms of proximity effects magnitude, at 20kV and 50 kV, to RAY-PF resist show- ing clearly advantages over such three components novolac ba- sed positive resist.

Citation Download Citation

Serge V. Tedesco, Christophe Pierrat, Francoise Vinet, Brigitte Florin, Michel Lerme, and Jean Charles Guibert "PRIME process: an alternative to multiple layer resist systems and high accelerating voltage for e-beam lithography", Proc. SPIE 1263, Electron-Beam, X-Ray, and Ion-Beam Technology: Submicrometer Lithographies IX, (1 May 1990); https://doi.org/10.1117/12.20168

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available