Microprofilometry using a spatial carrier frequency interferometrical technique

Gottfried Frankowski; Frank Schillke

doi:10.1117/12.20272

1 August 1990 Microprofilometry using a spatial carrier frequency interferometrical technique

Gottfried Frankowski, Frank Schillke

Proceedings Volume 1266, In-Process Optical Measurements and Industrial Methods; (1990) https://doi.org/10.1117/12.20272
Event: The International Congress on Optical Science and Engineering, 1990, The Hague, Netherlands

Abstract

Parameters which describe the surface topoqraphy in terms are the spatial frequencies the qr of the siope They will become hiqher values f the object under investigation is a rough sample. The range of these parameters what can be detected is limited by the method o measuremnt including signal evaluation. The aim of this paper is to deal w)th the range of these parameters using the method of spatial heterodyne technique: I

Citation Download Citation

Gottfried Frankowski and Frank Schillke "Microprofilometry using a spatial carrier frequency interferometrical technique", Proc. SPIE 1266, In-Process Optical Measurements and Industrial Methods, (1 August 1990); https://doi.org/10.1117/12.20272

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