Alignment strategy of an NA 0.8 Deep UV objective system for semiconductor defect inspection

Yunjong Kim; Young-Soo Kim; Dong-Kyun Kim; Hyun-il Cho

doi:10.1117/12.2676602

28 September 2023 Alignment strategy of an NA 0.8 Deep UV objective system for semiconductor defect inspection

Yunjong Kim, Young-Soo Kim, Dong-Kyun Kim, Hyun-il Cho

Proceedings Volume 12669, Optomechanical Engineering 2023; 126690O (2023) https://doi.org/10.1117/12.2676602
Event: SPIE Optical Engineering + Applications, 2023, San Diego, California, United States

Conference Poster

Abstract

A catadioptric design has been drawn to be used for semiconductor defect inspection in deep UV, which consists of nine lenses and mirrors. The numerical aperture was 0.8 and the whole length was 95 mm. The optical performances of the system were analyzed and the sensitivities of each component were investigated. Two lenses were found most sensitive and those lenses would be applied for the compensator when the system is going to be assembled. In this paper, the analysis results of the catadioptric system are presented, and the assembly plan is discussed.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Yunjong Kim, Young-Soo Kim, Dong-Kyun Kim, and Hyun-il Cho "Alignment strategy of an NA 0.8 Deep UV objective system for semiconductor defect inspection", Proc. SPIE 12669, Optomechanical Engineering 2023, 126690O (28 September 2023); https://doi.org/10.1117/12.2676602

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available