Development of a table-top surface inspection system based on phase-measuring deflectometry

Sangwon Hyun; Kyesung Lee; Mingab Bog

doi:10.1117/12.2676601

4 October 2023 Development of a table-top surface inspection system based on phase-measuring deflectometry

Sangwon Hyun, Kyesung Lee, Mingab Bog

Proceedings Volume 12672, Applied Optical Metrology V; 126720U (2023) https://doi.org/10.1117/12.2676601
Event: SPIE Optical Engineering + Applications, 2023, San Diego, California, United States

Conference Poster

Abstract

In this research, we developed a surface inspection system based on Phase-Measuring Deflectometry for specular surfaces. PMD is a non-contact, full-field optical measuring technique that measures the phase shifts caused by surface deformations. While PMD has seen significant advancements and increasing use in various industries due to its simple configuration and moderate precision, uncertainties in alignment and calibration can limit the practical performance of the system for industrial applications. To address this, we propose a system that measures freeform optical surfaces smaller than 50x50 mm2 using stereoscopic redundancy to eliminate height ambiguity. We apply self-calibration methods to maintain measurement precision below sub-micrometer level. Our measurement results of specular surfaces demonstrate a measurement precision of less than 0.1 um, with excellent convenience and less throughput time.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Sangwon Hyun, Kyesung Lee, and Mingab Bog "Development of a table-top surface inspection system based on phase-measuring deflectometry", Proc. SPIE 12672, Applied Optical Metrology V, 126720U (4 October 2023); https://doi.org/10.1117/12.2676601

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available