Scaling photonic integrated circuits with superconducting microwave kinetic inductance detectors

Majid Mohammad; Miguel Daal; Gopi Meena; Renan Moreira; Ben Mazin; Hawkins Clay; Galan Moody

doi:10.1117/12.2677607

5 October 2023 Scaling photonic integrated circuits with superconducting microwave kinetic inductance detectors

Majid Mohammad, Miguel Daal, Gopi Meena, Renan Moreira, Ben Mazin, Hawkins Clay, Galan Moody

Proceedings Volume 12673, Optics and Photonics for Information Processing XVII; 126730L (2023) https://doi.org/10.1117/12.2677607
Event: SPIE Optical Engineering + Applications, 2023, San Diego, California, United States

Abstract

This research presents the integration of ultra low loss (<1dB/cm) silicon nitride waveguides with a superconducting single photon detector with photon number resolving (PNR) capability - the Microwave Kinetic Inductance Detector - introducing a new photonic integrated circuit platform. Our approach is to integrate waveguides and MKIDs on a sapphire substrate, which minimizes the two level system noise for the MKIDs and serves as a bottom cladding for waveguides. Silicon nitride is used as the core of the waveguides and either SiO2 or SiOxNy is used as the top cladding. We present findings on how the fabrications processes -- including the materials used and the method of deposition -- affect the quality of the MKIDs and waveguides. The integrated system would ultimately be used to make photon number resolving detectors for quantum information applications and high resolution spectrometers for astrophysics and metrology applications.

Conference Presentation

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Majid Mohammad, Miguel Daal, Gopi Meena, Renan Moreira, Ben Mazin, Hawkins Clay, and Galan Moody "Scaling photonic integrated circuits with superconducting microwave kinetic inductance detectors", Proc. SPIE 12673, Optics and Photonics for Information Processing XVII, 126730L (5 October 2023); https://doi.org/10.1117/12.2677607

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KEYWORDS

Waveguides

Photonic integrated circuits

Inductance

Microwave radiation

Superconductors

Sapphire

Cladding

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