Signal loss due to Fresnel reflections on optical elements is a common issue in the terahertz frequency region, particularly in materials with high refractive indices, such as silicon and sapphire. Moth-eye structures are an effective solution to this problem, as they serve as broad-spectrum antireflection methods. However, creating sub-millimeter-sized protrusions for terahertz waves has been a challenge using conventional methods. Recently, ultrashort-pulsed laser processing has emerged as a precise technique for 3D microstructure production. We have been developing this technology and have achieved moth-eye structures with sub-wavelength precision, specifically tailored to cater to terahertz wavelengths. This presentation will focus on fabricating broadband terahertz anti-reflection moth-eye structures using ultrashort-pulsed lasers. Our design demonstrates almost total transmittance near 100 GHz and maintains this over 1 THz. We have achieved success in using this method to create large moth-eye structures with a diameter of 300mm, which have been utilized for radio astronomy purposes. These laser-fabricated microstructures hold significant promise in terahertz wave control.
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