Fabrication and surface evaluation of a high-precision monolithic mirror with complex geometry for soft x-ray focusing

T. Kume; Y. Matsuzawa; T. Saito; K. Hiraguri; Y. Takeo; T. Kimura; H. Kishimoto; Y. Senba; H. Ohashi; H. Mimura; H. Hashizume

doi:10.1117/12.2677302

3 October 2023 Fabrication and surface evaluation of a high-precision monolithic mirror with complex geometry for soft x-ray focusing

T. Kume, Y. Matsuzawa, T. Saito, K. Hiraguri, Y. Takeo, T. Kimura, H. Kishimoto, Y. Senba, H. Ohashi, H. Mimura, H. Hashizume

Author Affiliations +

Proceedings Volume 12694, Advances in X-Ray/EUV Optics and Components XVIII; 1269408 (2023) https://doi.org/10.1117/12.2677302
Event: SPIE Optical Engineering + Applications, 2023, San Diego, California, United States

Abstract

High-precision monolithic mirrors are used in the soft x-ray beamlines of synchrotron radiation facilities. A figure measurement technique is essential for the fabrication of high-precision mirrors. In recent years, mirrors of various shapes have been proposed, and a versatile figure measurement technique is required. Tactile measurements are one of the most suitable methods for evaluating the figure errors of x-ray mirrors with steep and complex geometries. Because a tactile measurement probe has a wide range of measurable depths and angles and can eliminate measurement errors depending on the sample curvature, tactile measurements have been applied to the fabrication of monolithic mirrors for soft x-ray focusing. In this study, a soft x-ray focusing mirror with concave and convex freeform surfaces on its monolithic substrate was fabricated based on tactile measurements for figure correction. The high- and mid-spatial-frequency roughness were 0.14-0.17 nm and 0.8 nm in RMS, respectively. Furthermore, the figure error evaluated using the tactile measurement was 2.64 nm in RMS.

Conference Presentation

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

T. Kume, Y. Matsuzawa, T. Saito, K. Hiraguri, Y. Takeo, T. Kimura, H. Kishimoto, Y. Senba, H. Ohashi, H. Mimura, and H. Hashizume "Fabrication and surface evaluation of a high-precision monolithic mirror with complex geometry for soft x-ray focusing", Proc. SPIE 12694, Advances in X-Ray/EUV Optics and Components XVIII, 1269408 (3 October 2023); https://doi.org/10.1117/12.2677302

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