Design, fabrication, and characterization of a 5-THz MKIDs array

Qiang Zhi; Wei Geng; Wei-Tao Lv; Zhen-Hui Lin; Kang-Min Zhou; Jing Li; Sheng-Cai Shi

doi:10.1117/12.2688919

26 November 2023 Design, fabrication, and characterization of a 5-THz MKIDs array

Qiang Zhi, Wei Geng, Wei-Tao Lv, Zhen-Hui Lin, Kang-Min Zhou, Jing Li, Sheng-Cai Shi

Proceedings Volume 12776, Infrared, Millimeter-Wave, and Terahertz Technologies X; 1277609 (2023) https://doi.org/10.1117/12.2688919
Event: SPIE/COS Photonics Asia, 2023, Beijing, China

Abstract

Microwave kinetic inductance detectors (MKIDs) can detect photons ranging from terahertz, infrared, optical to X-ray frequencies. And it has the advantages of high sensitivity, easy frequency-domain multiplexing (FDM) readout, and simple structure for large-format arrays. With these advantages MKIDs are becoming the choice of incoherent detectors in astronomy such as imaging cameras and broadband imaging spectrometers. In this paper, we introduce the design and fabrication of a 5-THz 10×10 MKIDs array on a single chip from an 80-nm-thick aluminum (Al) superconducting film based on a high resistance silicon substrate. Each pixel is a quarter-wavelength resonator with its short-circuited end integrated with a 5-THz dipole antenna. The noise performance of the MKIDs is measured at 200-mK using both phase readout and amplitude readout, giving an electrical NEP ~10⁻¹⁷ W/Hz^0.5. Detailed results will be presented.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Qiang Zhi, Wei Geng, Wei-Tao Lv, Zhen-Hui Lin, Kang-Min Zhou, Jing Li, and Sheng-Cai Shi "Design, fabrication, and characterization of a 5-THz MKIDs array", Proc. SPIE 12776, Infrared, Millimeter-Wave, and Terahertz Technologies X, 1277609 (26 November 2023); https://doi.org/10.1117/12.2688919

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available