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Superconducting transition-edge sensors (TESs) are highly sensitive detectors and can detect electromagnetic wave radiations from millimeter/submillimeter, optical to 𝑥/γrays, suitable for cosmology, astrophysics, quantum information, and biosensing. In principle, thousands of TESs even more are required to enhance the detection efficiency for large-scale survey. Among other multiplexing schemes, microwave SQUID multiplexer (μMUX), consisting of resonators and RF SQUIDs, has a bandwidth of several GHz, thus multiplexing factor on the order of thousands, more suitable for readout of large TES arrays. We designed and fabricated superconducting coplanar waveguide (CPW) resonators with a high qualityfactor and second-order gradient RF SQUID with two inductive coupling structures respectively. Then, we optimized the critical current density of the Josephson junction and measured the mutual inductance parameters of the second-order gradient structure SQUID, which are consistent with the simulation results. Finally, we fabricated a cryogenic μMUX chip based on RF SQUID and resonator. We discussed the results of the development of μMUX in more detail.
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