Paper
1 August 1990 Excimer-laser-produced plasma studies
Author Affiliations +
Proceedings Volume 1279, Laser-Assisted Processing II; (1990) https://doi.org/10.1117/12.20625
Event: The International Congress on Optical Science and Engineering, 1990, The Hague, Netherlands
Abstract
The interaction of an Excimer laser with an aluminum surface was studied by a characterization of the blowoff plasma plume. The SDIOIMLI Two-Meter Laser, operating at XeF and KrF wavelengths, was used to illuminate mm sized spots on aluminum targets at fluences of 400 - 1250 J/cm2 for 1 .8 ps. The resultant plasma was characterized by numerous techniques. The temperature of the plasma as a function of distance out in the plume was measured by both a modified line reversal technique and spectral methods. The absolute ion density was measured as a function of distance out in the plume by a laser absorption technique. The temperature in the blowoff plasma plume was found to be relatively constant, dropping by approximately 50% in 1 cm. The density, however, fell by an order of magnitude in the same distance. The measured results agree with predictions from the 2-D Hydrocode STREAK.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Michael C. Cates "Excimer-laser-produced plasma studies", Proc. SPIE 1279, Laser-Assisted Processing II, (1 August 1990); https://doi.org/10.1117/12.20625
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KEYWORDS
Plasma

Temperature metrology

Aluminum

Absorption

Ions

Signal attenuation

Laser processing

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