Study of photomask manufacture process based on AI technology

Hiroshi Nakata; Ikuo Kikuchi; Noriko Baba; Maiko Hikichi; Shingo Yoshikawa

doi:10.1117/12.2684945

29 September 2023 Study of photomask manufacture process based on AI technology

Hiroshi Nakata, Ikuo Kikuchi, Noriko Baba, Maiko Hikichi, Shingo Yoshikawa

Proceedings Volume 12915, Photomask Japan 2023: XXIX Symposium on Photomask and Next-Generation Lithography Mask Technology; 129150P (2023) https://doi.org/10.1117/12.2684945
Event: Photomask Japan 2023, 2023, Online Only

Abstract

Today, the semiconductor industry is booming, because data centers, state-of-the-art devices, power semiconductors, etc. have high demand. In particular, EUV is leading the industry as a novel technology for advanced lithography. On the other hand, mature product lines are also supporting the overall semiconductor industry as a whole. Photomasks have become a very important key parameter for the semiconductor industry. The manufacture of photomasks with stable quality and on-time delivery is essential for stable chip production, but it is very challenging to identify manufacturing problems because of the wide variety of photomasks and patterns. In this study, we established a methodology to analyze the data of various equipment, processes, and materials in photomask manufacturing, and obtained various improvement results using Digital Transformation.

Citation Download Citation

Hiroshi Nakata, Ikuo Kikuchi, Noriko Baba, Maiko Hikichi, and Shingo Yoshikawa "Study of photomask manufacture process based on AI technology", Proc. SPIE 12915, Photomask Japan 2023: XXIX Symposium on Photomask and Next-Generation Lithography Mask Technology, 129150P (29 September 2023); https://doi.org/10.1117/12.2684945

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available