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Benjamin D. Bunday,Yvette Ball,Shari Klotzkin, andDouglas Patriarche
"Quantitative analysis of cross-section SEM spatial distortion artifacts", Proc. SPIE 12955, Metrology, Inspection, and Process Control XXXVIII, 129553O (10 April 2024); https://doi.org/10.1117/12.3012887
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Benjamin D. Bunday, Yvette Ball, Shari Klotzkin, Douglas Patriarche, "Quantitative analysis of cross-section SEM spatial distortion artifacts," Proc. SPIE 12955, Metrology, Inspection, and Process Control XXXVIII, 129553O (10 April 2024); https://doi.org/10.1117/12.3012887