High-precision 3D measurement method based on optical projection technology

Lei Liu; Xusheng Zhu; Li Zhou; Daixin Chen; Qi Qin

doi:10.1117/12.3008042

18 December 2023 High-precision 3D measurement method based on optical projection technology

Lei Liu, Xusheng Zhu, Li Zhou, Daixin Chen, Qi Qin

Proceedings Volume 12963, AOPC 2023: Optical Sensing, Imaging, and Display Technology and Applications; and Biomedical Optics; 129631N (2023) https://doi.org/10.1117/12.3008042
Event: Applied Optics and Photonics China 2023 (AOPC2023), 2023, Beijing, China

Abstract

Micro-nano 3d measurement method based on fringe projection technology is widely used in many detection scenarios due to large non-contact, field of view, high accuracy and high adaptability. However, there is a problem that the nonlinear motion of the scanning actuator introduces random scanning error in the actual measurement system, which leads to the reduction of absolute accuracy and measurement repeatability. In this paper, a random scanning error suppression method is proposed to solve this problem. The principle of mutual calibration of the second order slope of the theoretical modulation curve and the second order slope of the actual modulation curve of the grating fringe is used to achieve the accurate value of the scan step. The feasibility and progressiveness of this method are proved by theoretical derivation, simulation and experimental verification, which demonstrate that the measurement repeatability is better than 1nm in simulation, the absolute precision is better than 3nm and the measurement repeatability is better than 2nm in experiment.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Lei Liu, Xusheng Zhu, Li Zhou, Daixin Chen, and Qi Qin "High-precision 3D measurement method based on optical projection technology", Proc. SPIE 12963, AOPC 2023: Optical Sensing, Imaging, and Display Technology and Applications; and Biomedical Optics, 129631N (18 December 2023); https://doi.org/10.1117/12.3008042

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KEYWORDS

3D metrology

Fourier transforms

Structured light

Demodulation

Modulation

Light sources and illumination

Phase shifts

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