Design of white light interference inspection device and surface morphology analysis for focus mirror moulds

Shibo Wang; Yuejia Huang; Duo Li; Bo Wang

doi:10.1117/12.3009729

29 December 2023 Design of white light interference inspection device and surface morphology analysis for focus mirror moulds

Shibo Wang, Yuejia Huang, Duo Li, Bo Wang

Author Affiliations +

Proceedings Volume 12976, Eighth Asia Pacific Conference on Optics Manufacture and Third International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2023); 1297627 (2023) https://doi.org/10.1117/12.3009729
Event: 8th Asia Pacific Conference on Optics Manufacture & 3rd International Forum of Young Scientists on Advanced Optical Manufacturing, 2023, Shenzhen, China

Abstract

In this paper, a white light interference detection device is mainly established to measure the surface roughness of the focusing lens mold to test whether the surface roughness of the mold meets the requirements of making lenses. The model is established by SolidWorks software, the static and dynamic analysis of the machine tool model is carried out by Ansys Workbench software, and then the measurement experiment of the surface roughness of the focusing mirror mold is carried out.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Shibo Wang, Yuejia Huang, Duo Li, and Bo Wang "Design of white light interference inspection device and surface morphology analysis for focus mirror moulds", Proc. SPIE 12976, Eighth Asia Pacific Conference on Optics Manufacture and Third International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2023), 1297627 (29 December 2023); https://doi.org/10.1117/12.3009729

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