Laser cleaning of large-aperture optics used in high power laser facility with airflow assistance

Jingxuan Wang

doi:10.1117/12.3019536

22 December 2023 Laser cleaning of large-aperture optics used in high power laser facility with airflow assistance

Jingxuan Wang

Proceedings Volume 12982, Pacific-Rim Laser Damage 2023: Optical Materials for High-Power Lasers; 1298204 (2023) https://doi.org/10.1117/12.3019536
Event: SPIE/SIOM Pacific Rim Laser Damage, 2023, Shanghai, China

Abstract

For the contaminated large-aperture vacuum separator coated with SiO2 sol-gel antireflection film in the facility, a Nd: YAG pulsed laser with a wavelength of 355 nm was performed in laser cleaning experiment. The experiment adopted a single-shot laser dry cleaning and a laser cleaning system assisted by an airflow replacement system. The experimental results suggest that there is an optimal process window for laser in-situ cleaning of optics. The optimal laser energy density for dry laser cleaning is 1.71 J/cm², and the total particle removal rate is 57.67%. After using the airflow assisted laser cleaning process, the total particle removal rate is increased to 82.21%, which is improved by 24.54%, and it can effectively achieve complete removal of particles over 5 μm in diameter. Additionally, the optical microscope analysis results show that adding an airflow displacement system will not affect the substrate laser damage threshold. The result indicates that the airflow displacement assisted laser cleaning can effectively improve its cleaning effect and reduce the particle re-adhesion.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Jingxuan Wang "Laser cleaning of large-aperture optics used in high power laser facility with airflow assistance", Proc. SPIE 12982, Pacific-Rim Laser Damage 2023: Optical Materials for High-Power Lasers, 1298204 (22 December 2023); https://doi.org/10.1117/12.3019536

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