2D nanopillars patterning of complex shape using multiple colloidal lithography illumination on photo-patternable TiO2 and ZrO2 based sol-gel layers

Rosa Olloghe Mandoukou; Victor Vallejo Otero; Arnaud Valour; Marie Traynar; Maxime Royon; Isabelle Verrier; Olivier Lebaigue; Olivier Dellea; Nicolas Crespo-Monteiro; Yves Jourlin

doi:10.1117/12.3017396

24 June 2024 2D nanopillars patterning of complex shape using multiple colloidal lithography illumination on photo-patternable TiO₂ and ZrO₂ based sol-gel layers

Rosa Olloghe Mandoukou, Victor Vallejo Otero, Arnaud Valour, Marie Traynar, Maxime Royon, Isabelle Verrier, Olivier Lebaigue, Olivier Dellea, Nicolas Crespo-Monteiro, Yves Jourlin

Author Affiliations +

Proceedings Volume 13020, Advances in Optical Thin Films VIII; 130200L (2024) https://doi.org/10.1117/12.3017396
Event: SPIE Optical Systems Design, 2024, Strasbourg, France

Abstract

Metal oxides such as titanium oxide (TiO₂) and zirconium oxide (ZrO₂) have attracted a great interest in recent years due to their many remarkable physical and chemical properties. The high performance of these materials allows their use in a wide range of applications such as photocatalysis, mechanics and chemistry. They are also used in optical applications; as sensors, anti-counterfeiting devices, or in medical applications for dental implants. In this paper, we present a process for structuring thin films of metal oxides using a sol-gel deposition method. Unlike more conventional methods such as reactive sputtering, chemical vapor deposition and atomic layer deposition, this technique facilitates the micro-nano structuring of films by optical lithography techniques, in particular colloidal lithography.

Conference Presentation

Citation Download Citation

Rosa Olloghe Mandoukou, Victor Vallejo Otero, Arnaud Valour, Marie Traynar, Maxime Royon, Isabelle Verrier, Olivier Lebaigue, Olivier Dellea, Nicolas Crespo-Monteiro, and Yves Jourlin "2D nanopillars patterning of complex shape using multiple colloidal lithography illumination on photo-patternable TiO₂ and ZrO₂ based sol-gel layers", Proc. SPIE 13020, Advances in Optical Thin Films VIII, 130200L (24 June 2024); https://doi.org/10.1117/12.3017396

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available