Advances in modeling and optimization for two-photon lithography

Valeriia Sedova; Florie Ogor; Joёl Rovera; Odysseas Tsilipakos; Lisa Lemberg; Kevin Heggarty; Andreas Erdmann

doi:10.1117/12.3017407

17 June 2024 Advances in modeling and optimization for two-photon lithography

Valeriia Sedova, Florie Ogor, Joёl Rovera, Odysseas Tsilipakos, Lisa Lemberg, Kevin Heggarty, Andreas Erdmann

Proceedings Volume 13023, Computational Optics 2024; 1302309 (2024) https://doi.org/10.1117/12.3017407
Event: SPIE Optical Systems Design, 2024, Strasbourg, France

Abstract

Metasurfaces have become a key focus in research and are applied in numerous fields because of their exceptional capability to control electromagnetic waves across microwave to optical frequencies. These artificial sheet materials have the advantages of lightweight and ability to control wave propagation both on the surface and in the surrounding free space. The complexity of fabricating metasurfaces via two-photon lithography (TPL) is addressed through sophisticated modeling. Critical to the success of TPL is the ability to predict the effects of the fabrication process on the final product. This paper introduces three distinct modeling approaches that vary in complexity and predictive capabilities. We evaluate the performance and limitations of a simple threshold model, a compact model and a full model of polymerization. Through application examples, we demonstrate how these models can guide the fabrication of metasurfaces.

Conference Presentation

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Valeriia Sedova, Florie Ogor, Joёl Rovera, Odysseas Tsilipakos, Lisa Lemberg, Kevin Heggarty, and Andreas Erdmann "Advances in modeling and optimization for two-photon lithography", Proc. SPIE 13023, Computational Optics 2024, 1302309 (17 June 2024); https://doi.org/10.1117/12.3017407

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available