Metalens for 80×60 SOI diode uncooled IRFPA

M. Hanaoka; S. Ogawa; M. Iwakawa; S. Fukushima; M. Shimatani

doi:10.1117/12.3012746

7 June 2024 Metalens for 80×60 SOI diode uncooled IRFPA

M. Hanaoka, S. Ogawa, M. Iwakawa, S. Fukushima, M. Shimatani

Proceedings Volume 13046, Infrared Technology and Applications L; 130461V (2024) https://doi.org/10.1117/12.3012746
Event: SPIE Defense + Commercial Sensing, 2024, National Harbor, Maryland, United States

Conference Poster

Abstract

Lenses for use in the infrared (IR) wavelength region are key elements of IR image sensors, and determine the cost and performance of such sensors. As an alternative to a conventional lens, we designed and fabricated a silicon-based metalens in order to realize a compact, high-performance IR focal plane array (IRFPA) system. The metalens was developed using an automatic inverse design technique based on a rigorous coupled wavelength analysis. It consisted of a periodic array of pillars fabricated by deep reactive-ion etching of a silicon wafer. This metalens was designed for the 80×60 IRFPA used in the Mitsubishi Electric Corporation MIR8060B1, which comprises an array of pn-junction diodes formed on a silicon-on-insulator layer. It is expected that this metalens-based IR sensor will expand the range of applications of such sensors.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

M. Hanaoka, S. Ogawa, M. Iwakawa, S. Fukushima, and M. Shimatani "Metalens for 80×60 SOI diode uncooled IRFPA", Proc. SPIE 13046, Infrared Technology and Applications L, 130461V (7 June 2024); https://doi.org/10.1117/12.3012746

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available