Paper
26 February 2024 Four layer integrated optical biosensor
Kamakshi Manchikalapati, Nandini VL, Srinivas Talabattula
Author Affiliations +
Proceedings Volume 13076, SPIE Advanced Biophotonics Conference (SPIE ABC 2023); 130760A (2024) https://doi.org/10.1117/12.3017748
Event: SPIE Advanced Biophotonics Conference (SPIE ABC 2023), 2023, Jeju, Korea, Republic of
Abstract
Integrated optical biosensors are capable of combining properties of miniaturization, stability and high sensitivity. In this paper a novel integrated optic biosensor for the measurement of glucose concentration in the blood design is proposed and analysed mathematically. The configuration is based on silicon on insulator technology and consists of four layers, the oxide substrate layer, thin silicon nitride layer to enhance the sensitivity, the silicon ridge waveguide optical guiding layer, and the cover layer consisting of bio-analyte to be measured. The main idea in this configuration is the introduction of thin nitride layer in between silicon and silicon dioxide. Then it was observed that in the case of three layer waveguide the mode penetration into the cladding influences the sensitivity. Introduction of silicon nitride layer between the oxide and guiding layer reduces the refractive index contrast between the substrate and the guiding layer resulting in increased penetration depth. We obtain a sensitivity of 1%, in terms of effective refractive index change.
(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.
Kamakshi Manchikalapati, Nandini VL, and Srinivas Talabattula "Four layer integrated optical biosensor", Proc. SPIE 13076, SPIE Advanced Biophotonics Conference (SPIE ABC 2023), 130760A (26 February 2024); https://doi.org/10.1117/12.3017748
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KEYWORDS
Biosensors

Glucose

Silicon

Waveguides

Refractive index

Biological research

Integrated optics

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