Paper
1 September 1990 Schottky-barrier image sensor with 100% fill factor
Walter F. Kosonocky, Thomas S. Villani, Frank V. Shallcross, Grazyna M. Meray, John J. O'Neill III
Author Affiliations +
Abstract
A new concept, the Direct Schottky Injection (DSI), is described for a three-dimensional construction of infrared imagers with a continuous Schottky-barrier-detector surface on one side of a thinned (10 to 25 microns) silicon substrate and p-type buried-channel CCD readout structure on the other side. The DSI structure provides a 100-percent fill factor, a large charge-handling capacity, and a high-density pixel design. The construction and operation are described for DSI imagers with frame-transfer CCD (FT-CCD) and interline-transfer CCD(IT-CCD) readout. The operation of the IT-CCD DSI imager was demonstrated with a 128 x 128 focal plane array (FPA) with 50 x 50-micron pixels.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Walter F. Kosonocky, Thomas S. Villani, Frank V. Shallcross, Grazyna M. Meray, and John J. O'Neill III "Schottky-barrier image sensor with 100% fill factor", Proc. SPIE 1308, Infrared Detectors and Focal Plane Arrays, (1 September 1990); https://doi.org/10.1117/12.21717
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CITATIONS
Cited by 7 scholarly publications.
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KEYWORDS
Imaging systems

Staring arrays

Charge-coupled devices

Silicon

Electrodes

Signal detection

Thermography

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