Binary pseudo-random array for calibration of interferometers with transmission spheres and cylinders

K. Munechika; S. Rochester; W. Chao; I. Lacey; C. Pina-Hernandez; K. Yamada; M. P. Biskach; P. Takacs; U. Griesmann; V. V. Yashchuk

doi:10.1117/12.3028496

30 September 2024 Binary pseudo-random array for calibration of interferometers with transmission spheres and cylinders

K. Munechika, S. Rochester, W. Chao, I. Lacey, C. Pina-Hernandez, K. Yamada, M. P. Biskach, P. Takacs, U. Griesmann, V. V. Yashchuk

Author Affiliations +

Proceedings Volume 13135, Interferometry and Structured Light 2024; 1313505 (2024) https://doi.org/10.1117/12.3028496
Event: Optical Engineering + Applications, 2024, San Diego, California, United States

Abstract

Binary pseudo-random array (BPRA) “white noise” artifacts are highly effective for characterizing the instrument transfer function (ITF) of surface topography metrology tools and wavefront measurement instruments. These BPRA artifacts feature all spatial frequencies within the instrument bandpass equally, resulting in a power spectral density with a white-noise-like character. This characteristic allows for direct ITF determination with uniform sensitivity across the entire spatial frequency range. We have developed a novel BPRA calibration standard that combines the diffractive pattern of a reflection computer-generated hologram (CGH) with the white noise generating BPRA pattern. By integrating these technologies using the same lithographic techniques, the resulting calibration sample enables ITF characterization of a Fizeau interferometer with a transmission sphere, or any nulling optic.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

K. Munechika, S. Rochester, W. Chao, I. Lacey, C. Pina-Hernandez, K. Yamada, M. P. Biskach, P. Takacs, U. Griesmann, and V. V. Yashchuk "Binary pseudo-random array for calibration of interferometers with transmission spheres and cylinders", Proc. SPIE 13135, Interferometry and Structured Light 2024, 1313505 (30 September 2024); https://doi.org/10.1117/12.3028496

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KEYWORDS

Computer generated holography

Fizeau interferometers

Spherical lenses

Fabrication

Microscopes

Calibration

Design

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