Improvement of micro-LED top emission through surface nanostructures and chip design

Meng Le; Guobin Wang; Ying Yan; Ziwei Wang; Jinbiao Huang; Yu Xu; Ti Sun; Feng Xu; Bing Cao

doi:10.1117/12.3030379

3 June 2024 Improvement of micro-LED top emission through surface nanostructures and chip design

Meng Le, Guobin Wang, Ying Yan, Ziwei Wang, Jinbiao Huang, Yu Xu, Ti Sun, Feng Xu, Bing Cao

Proceedings Volume 13182, 2024 International Conference on Optoelectronic Information and Optical Engineering (OIOE 2024); 131822H (2024) https://doi.org/10.1117/12.3030379
Event: 2024 International Conference on Optoelectronic Information and Optical Engineering (OIOE 2024), 2024, Kunming, China

Abstract

Micro-LED has been widely studied due to its strong performance and has applications in fields such as display, biology, and communication. However, as the size of the micro-LED decreases, so does the light extraction efficiency and top emission, which affects its development and application. The improvement of light extraction efficiency is crucial. Surface nanostructures and chip design are utilized to enhance the top emission efficiency of micro-LEDs in this work. Top emission percentage and top emission efficiency of 10 μm GaN-based vertically flip-chip micro-LED are studied in relation to their structural parameters using the three-dimensional time-domain finite-difference method (3D FDTD) simulation. The results show a clear relationship between the structural parameters and the top emission efficiency. Surface micro-LED structures with a period ranging from 0 to 1200 nm are designed and prepared. The sidewall inclination is also optimized to achieve the optimal top emission efficiency. Full-structure simulations of spectral distributions and dipole source polarization are performed to obtain accurate results. The top emission percentage and top light emission efficiency are improved from 22.0% and 6.5% to 78.0% and 26.5%, respectively, compared to the conventional 10 μm micro-LED structures.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Meng Le, Guobin Wang, Ying Yan, Ziwei Wang, Jinbiao Huang, Yu Xu, Ti Sun, Feng Xu, and Bing Cao "Improvement of micro-LED top emission through surface nanostructures and chip design", Proc. SPIE 13182, 2024 International Conference on Optoelectronic Information and Optical Engineering (OIOE 2024), 131822H (3 June 2024); https://doi.org/10.1117/12.3030379

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