Development of matrix technology of linear-angular measurements

Aleksander N. Korolev; Alexander Ya. Lukin; Yuri V. Filatov; Roman A. Larichev

doi:10.1117/12.3036874

20 November 2024 Development of matrix technology of linear-angular measurements

Aleksander N. Korolev, Alexander Ya. Lukin, Yuri V. Filatov, Roman A. Larichev

Proceedings Volume 13241, Optical Metrology and Inspection for Industrial Applications XI; 1324110 (2024) https://doi.org/10.1117/12.3036874
Event: SPIE/COS Photonics Asia, 2024, Nantong, Jiangsu, China

Abstract

Studies of matrix angle meters with a scale diameter of 5 and 23 mm have been carried out. The objective of the research was to assess the possibility of achieving the predicted meteorological parameters at the level of hundredths of an arc second for angle measurements and several nanometers for linear. To do this, work was carried out to stabilize the meters using a heat sink and thermal protection. Angular measurements were carried out on the basis of a goniometer rotary platform with an angle sensor LIR. Linear measurements were carried out on a two-channel stand with two identical matrix displacement meters. In both experiments, 1.3 Megapixel CMOS digital cameras were used as an image analyzer. It is concluded that the random error of the studied matrix meters does not exceed 0.05 arc-sec for angular measurements and 15 nm for measuring displacements.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Aleksander N. Korolev, Alexander Ya. Lukin, Yuri V. Filatov, and Roman A. Larichev "Development of matrix technology of linear-angular measurements", Proc. SPIE 13241, Optical Metrology and Inspection for Industrial Applications XI, 1324110 (20 November 2024); https://doi.org/10.1117/12.3036874

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KEYWORDS

Matrices

Sensors

Cameras

Photodetectors

Angle measurement

Digital cameras

Image quality

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