Diamond membranes for x-ray lithography

Charles R. Guarnieri; Jerome J. Cuomo; S. J. Whitehair; B. S. Berry; W. C. Pritchet; Raul E. Acosta; Alan D. Wilson

doi:10.1117/12.22471

1 December 1990 Diamond membranes for x-ray lithography

Charles R. Guarnieri, Jerome J. Cuomo, S. J. Whitehair, B. S. Berry, W. C. Pritchet, Raul E. Acosta, Alan D. Wilson

Proceedings Volume 1325, Diamond Optics III; (1990) https://doi.org/10.1117/12.22471
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

Diamond membranes are being developed for x-ray lithography masks. Typically these 1-3 im thick membrane films are deposited on Si substrates using microwave driven plasmas. To obtain smooth films with uniform tensile stress spray and electrophoretic deposition of 0. 1 zm diamond seeds were used to control the initial nucleation and growth of the diamond films. The films have a room ternperature tensile stress of 25-125 MPa. The temperature dependence of the stress is due to the tensile growth stress of the diamond film and the thermal stress of the diamond-Si layer structure. The films have a biaxial modulus of 800 GPa. X-ray lithography masks have been made and used to print patterns with x-rays from a synchrotron source. 1 .

Citation Download Citation

Charles R. Guarnieri, Jerome J. Cuomo, S. J. Whitehair, B. S. Berry, W. C. Pritchet, Raul E. Acosta, and Alan D. Wilson "Diamond membranes for x-ray lithography", Proc. SPIE 1325, Diamond Optics III, (1 December 1990); https://doi.org/10.1117/12.22471

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available