New optical design of exposure system: algorithm for designing irradiating lens and design of exposure system for use in liquid crystal display

Kenji Endo; Haruo Uemura; Shin-ichi Nagata; Masayoshi Kobayashi; Atsushi Abematsu

doi:10.1117/12.22820

1 November 1990 New optical design of exposure system: algorithm for designing irradiating lens and design of exposure system for use in liquid crystal display

Kenji Endo, Haruo Uemura, Shin-ichi Nagata, Masayoshi Kobayashi, Atsushi Abematsu

Author Affiliations +

Proceedings Volume 1333, Advanced Optical Manufacturing and Testing; (1990) https://doi.org/10.1117/12.22820
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

A new algorithm for designing an illuminator in a proximity exposure system is discussed. A relation between aberration of an irradiating lens and the irradiance distribution is studied and it is found that the lens has to satisfy the expression:h =f tan 0 to achieve uniform distribution. We designed a new-type illuminator with irradiating lens based on this expression and used a Fresnel lens as a collimator. This illuminator has high uniformity in the distribution within over an exposure area of 650mm x 650 mm. It has a collimation angle which is desirable fOr high resolution; and, experimentally, a resolution of 5 p.m line and space pattern was observed with a gap of 50 p.m.

Citation Download Citation

Kenji Endo, Haruo Uemura, Shin-ichi Nagata, Masayoshi Kobayashi, and Atsushi Abematsu "New optical design of exposure system: algorithm for designing irradiating lens and design of exposure system for use in liquid crystal display", Proc. SPIE 1333, Advanced Optical Manufacturing and Testing, (1 November 1990); https://doi.org/10.1117/12.22820

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available