XUV characterization comparison of Mo/Si multilayer coatings

David L. Windt; Warren K. Waskiewicz; Glenn D. Kubiak; Troy W. Barbee Jr.; Richard N. Watts

doi:10.1117/12.23200

1 February 1991 XUV characterization comparison of Mo/Si multilayer coatings

David L. Windt, Warren K. Waskiewicz, Glenn D. Kubiak, Troy W. Barbee Jr., Richard N. Watts

Proceedings Volume 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography; (1991) https://doi.org/10.1117/12.23200
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

The reflectances of seven Mo/Si multilayer coatings have been measured using three different reflectometers in order to determine whether reflectance measurements made using different reflectometers yield consistent results. By comparing the deduced adjustable parameters used to fit the measured reflectances with those calculated from a model based on recursive application of the modified Fresnel equations, it is concluded that the measurements made with the three reflectometers are inconsistent. The discrepancies are attributed to systematic measurement errors, including those associated with the spectral purity of the incident radiation.

Citation Download Citation

David L. Windt, Warren K. Waskiewicz, Glenn D. Kubiak, Troy W. Barbee Jr., and Richard N. Watts "XUV characterization comparison of Mo/Si multilayer coatings", Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, (1 February 1991); https://doi.org/10.1117/12.23200

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