Silicon-on-silicon microsystem in plastic packages

Agneta Novak; Anders Glaes; Claes Blom; Hans Hentzell; Charles Hodges; Farzeen Kalhur

doi:10.1117/12.47720

1 April 1991 Silicon-on-silicon microsystem in plastic packages

Agneta Novak, Anders Glaes, Claes Blom, Hans Hentzell, Charles Hodges, Farzeen Kalhur

Proceedings Volume 1389, Microelectronic Interconnects and Packages: Optical and Electrical Technologies; (1991) https://doi.org/10.1117/12.47720
Event: Advances in Intelligent Robotics Systems, 1990, Boston, MA, United States

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Agneta Novak, Anders Glaes, Claes Blom, Hans Hentzell, Charles Hodges, and Farzeen Kalhur "Silicon-on-silicon microsystem in plastic packages", Proc. SPIE 1389, Microelectronic Interconnects and Packages: Optical and Electrical Technologies, (1 April 1991); https://doi.org/10.1117/12.47720

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