Paper
1 June 1991 Characterization of subsurface damage in glass and metal optics
Robert S. Polvani, Christopher J. Evans
Author Affiliations +
Abstract
Even unusual care in polishing leads to optics with somewhat damaged working faces. The question is to what degree? the physical nature of this damage depeids on the ductility or plasticity of the constniction material. Glassy materials (glass brittle metals and semiconductors) fracture while ductile materials work harden. Beryffium suffers from both modes. To physically model damage we oversimplify and picture a surface layer with two features a depth and an intensity of the IvjIk property changes. A statistical alternative to intensity is the visible flaw density. We use a variety of analytical mathods but mainly x-ray diffraction metallography and instrumented microindentation and frequently use them in combination. Our problem is to develop a general hasis and means of characterizing subsurface damage. To illustrate the diversity difficulty and our progress with the problem we will report experiences with a variety of examples. The talk will consider damage in ductile regimeN ground classically polished fused silica BK-7 pyrex optics esuperu polished BK-i precision ground silicon nitride and aluminaceramics and precision CBN turned beryllium.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Robert S. Polvani and Christopher J. Evans "Characterization of subsurface damage in glass and metal optics", Proc. SPIE 1441, Laser-Induced Damage in Optical Materials: 1990, (1 June 1991); https://doi.org/10.1117/12.57211
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KEYWORDS
Glasses

Polishing

Metal optics

Metals

Mathematical modeling

Semiconductors

Silica

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