Paper
1 November 1991 Single crystallinity and oxygen diffusion in high-quality YBa2Cu3O7-δ films
Zi Liang Wu, M. Z. Wei, Yi-Xin Chen, Cong Xin Ren, Jihong Zhang
Author Affiliations +
Proceedings Volume 1519, International Conference on Thin Film Physics and Applications; (1991) https://doi.org/10.1117/12.47338
Event: International Conference on Thin Film Physics and Applications, 1991, Shanghai, China
Abstract
High quality epitaxial YBa2Cu3O7-(delta) films prepared by d.c. magnetron sputtering are single crystalline containing mosaic blocks, the boundaries of which consist of arrays of dislocations piling up into walls. Low temperature oxygenation in the orthorhombic phase is carried out by pipe diffusion in the basal planes. An equation has been derived from the dislocation model of low angle tilting grain boundary which predicts a linear relationship between the oxygen increase 1-(delta) and t3/4, where t is the diffusion time. Two straight lines were established for oxygen anneal respectively at 300 degree(s)C and 350 degree(s)C and these verified the proposed model explicitly. From slops of these two straight lines, an activation energy of 1.18 eV for lattice diffusion of oxygen is obtained.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Zi Liang Wu, M. Z. Wei, Yi-Xin Chen, Cong Xin Ren, and Jihong Zhang "Single crystallinity and oxygen diffusion in high-quality YBa2Cu3O7-δ films", Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); https://doi.org/10.1117/12.47338
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KEYWORDS
Oxygen

Diffusion

Crystals

Thin films

Annealing

Chemical species

Physics

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