Scatter properties of gratings at ultraviolet and visible wavelengths

John F. Hoose; Jeffrey L. Olson

doi:10.1117/12.49413

1 October 1991 Scatter properties of gratings at ultraviolet and visible wavelengths

John F. Hoose, Jeffrey L. Olson

Proceedings Volume 1545, International Conference on the Application and Theory of Periodic Structures; (1991) https://doi.org/10.1117/12.49413
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

We show measurements of interorder scattered light from various grating surfaces. The measurements compare holographic and ruled gratings for in-plane and out-of-plane conditions at 254 nm and 633 nm.

Citation Download Citation

John F. Hoose and Jeffrey L. Olson "Scatter properties of gratings at ultraviolet and visible wavelengths", Proc. SPIE 1545, International Conference on the Application and Theory of Periodic Structures, (1 October 1991); https://doi.org/10.1117/12.49413

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