Mass-producible optical guided-wave devices fabricated by photopolymerization

Hayami Hosokawa; Noriyoshi Horie; Tsukasa Yamashita

doi:10.1117/12.50673

1 December 1991 Mass-producible optical guided-wave devices fabricated by photopolymerization

Hayami Hosokawa, Noriyoshi Horie, Tsukasa Yamashita

Proceedings Volume 1559, Photopolymer Device Physics, Chemistry, and Applications II; (1991) https://doi.org/10.1117/12.50673
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

Mass-producible optical waveguide devices and their fabrication method for integrated optics are described. Single-mode polymer rib waveguides and grating couplers in planar polymer waveguides which are a key component for organic integrated optical devices have been successfully developed by using photopolymerization (2P) method. The method is based on an electron-beam lithography technique for writing original patterns and a replicating technique using a molding stamper.

Citation Download Citation

Hayami Hosokawa, Noriyoshi Horie, and Tsukasa Yamashita "Mass-producible optical guided-wave devices fabricated by photopolymerization", Proc. SPIE 1559, Photopolymer Device Physics, Chemistry, and Applications II, (1 December 1991); https://doi.org/10.1117/12.50673

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